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功能/应用范围:
用于检测集成电路功能之完整性, 为集成电路生产制造之最后流程, 以确保集成电路生产制造之品质。
主要技术指标:
The ETS-88 consists of four test head segments each containing up to 6 floating resources, 32 digital pins and 1 QTMU:
SPU family - dual channel Smart Pin Unit comprised of 100V, 250V, and 500V options
WCU-2220 - Wave Form Capture Unit functioning as a system o-scope
QMS - Quad Measurement System providing four independent DSP channels with high speed and accuracy
HPU - High Power Unit capable of sourcing 100A
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