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功能/应用范围：
FA-2000 for Delayering RIE FA System
主要技术指标：
Primary voltage source all modules:100-240 VAC +/-10% taps must be adjusted on pump
Amperage requirements: 10/20 amps
Power conumption: 2000 VA max
Acoustic noise: 69.8 db max excluding vacuum pump
RF generator output: 0-600 watts@13.56MHz
Process impedance's: 50 Ohms
Gas connections: 1/4" swagelock@ 20-45 P.S.I (non corrosive gases)
Operation gas: 1/4" swagelock@ 60-90 P.S.I (CGA or N2)
Coolant: 1/4" swagelock house water or chiller
Vacuun ports: 1/5" for intake and exhaust
服务内容：
无
服务典型成果：
无
用户须知：
收费标准：
面议